Surface contamination control of plant surfaces by supersonic jet

Kiss, Endre and Kovács-Bokor, Éva ORCID: https://orcid.org/0000-0002-7018-3530 (2020) Surface contamination control of plant surfaces by supersonic jet. In: Termeljünk együtt a természettel - az agrárerdészet mint új kitörési lehetőség. Dunakavics könyvek (ISSN: 2064-3837), 1 (16). DUE Press, Dunaújváros, pp. 97-103. ISBN 978-615-6142-06-1ö, 978-615-6142-07-8

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Abstract

A contactless surface cleaner equipment using supersonic gas jet with ion injection has been developed in order to remove solid contaminations fatal to the quality of semiconductors, as well as mechanical and optical technologies. Contaminations a main dimensions beyond about 30µm can be removed by a shock wave of a sufficient strength, so far as they are not bond with adhesive elements. Dusts larger than a few µm can be removed by the combination of chock wave and ionic current. Some chemical deposition can be removed by adding acetone to the chock wave gun. In vacuum ion current and shock wave are more effective than those are in normal environment. The irradiation by ultraviolet light on the intersection between adhesively bound contaminant and sample surface enhances the removal performance.

Item Type:	Book Section
Uncontrolled Keywords:	Surface cleaning; ultrasonic nozzle; contamination control
Divisions:	Műszaki Intézet > Természettudományi és Környezetvédelmi Tanszék
Depositing User:	Gergely Beregi
Date Deposited:	11 Jul 2025 12:03
Last Modified:	11 Jul 2025 12:03
URI:	https://publication.repo.uniduna.hu/id/eprint/1220
MTMT:	31722825

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